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Page 1
Short-period multilayer X-ray mirrors.
Andreev SS, Bibishkin MS, Chkhalo NI, Kluenkov EB, Prokhorov KA, Salashchenko NN, Zorina MV, Schafers F, Shmaenok LA. Andreev SS, et al. Among authors: zorina mv. J Synchrotron Radiat. 2003 Sep 1;10(Pt 5):358-60. doi: 10.1107/s0909049503015255. Epub 2003 Aug 28. J Synchrotron Radiat. 2003. PMID: 12944620
X-ray scattering by the fused silica surface etched by low-energy Ar ions.
Barysheva MM, Chkhalo NI, Drozdov MN, Mikhailenko MS, Pestov AE, Salashchenko NN, Vainer YA, Yunin PA, Zorina MV. Barysheva MM, et al. Among authors: zorina mv. J Xray Sci Technol. 2019;27(5):857-870. doi: 10.3233/XST-190495. J Xray Sci Technol. 2019. PMID: 31282467
Influence of barrier interlayers on the performance of Mo/Be multilayer mirrors for next-generation EUV lithography.
Svechnikov MV, Chkhalo NI, Gusev SA, Nechay AN, Pariev DE, Pestov AE, Polkovnikov VN, Tatarskiy DA, Salashchenko NN, Schäfers F, Sertsu MG, Sokolov A, Vainer YA, Zorina MV. Svechnikov MV, et al. Among authors: zorina mv. Opt Express. 2018 Dec 24;26(26):33718-33731. doi: 10.1364/OE.26.033718. Opt Express. 2018. PMID: 30650805 Free article.
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